| 摘要 |
PURPOSE:To perform the laser beam machining properly for various samples by projecting the laser light from one direction of a sample by the 1st optical path, by projecting on the sample from another direction by the 2nd optical path by providing an optical path switching means. CONSTITUTION:The sample case 20 containing a sample is set on a sample base 2, the image picked up by a TV camera 25 is displayed on a monitor TV 40 and a table driving part 3 is roughly set to the position suitable for the work by driving the table driving part 3 with watching this display. The alignment of the position where the laser light of each sample is projected and the laser light projecting position is then performed. Shutters 52, 53 are closed at the completion time of this alignment. The laser light emitted from a laser light source (YAG laser) 1 selects the shutters 52, 53 of an optical path shifting device 5, thereafter, the work is executed by projecting the laser light on the sample through the selected optical path by the shutter 7 or 8, or shutters 7 and 8. |
