| 摘要 |
PURPOSE:To increase the sensing response speed of a gap sensor and to execute laser beam processing by making the control of a driving device for driving a processing head independent from a main numerical control device for controlling the other control object over the entire part of a laser beam machine. CONSTITUTION:The control of the gap with a work by a gap sensor is executed by a sensor control unit 123 which is independent from the main numerical control device. The electric capacity between the gap sensor and the work is changed when the gap is changed by the deformation, positioning error, etc., of the work. The change rate of the electric capacity is taken into an oscillation circuit 119 of the sensor control unit 123, by which an oscillation frequency (f) is changed. Only the change component DELTAof the frequency is taken out by a modulating circuit 117 and is taken into a frequency counter circuit 125. A digital signal is formed in the circuit 125 and the voltage as the positional feedback of the gap sensor is outputted by a digital to analog converter 127. |
