| 摘要 |
The deformable diaphragm 1 of a pressure sensor, made of a monocrystalline semiconductor such as silicon, comprises, in addition to a piezoresistive element 5 formed by a very small insulated linear portion within the single crystal, a similar element 7 disposed and oriented with respect to the axes of the crystal lattice so as to minimise the influence of mechanical stresses on the value of its resistance, which then depends solely on the temperature of the diaphragm. Knowing the latter makes it possible to correct the pressure value provided by the element 5. <IMAGE>
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