发明名称 DISCHARGE EXCITATION SHORT-PULSE LASER DEVICE
摘要 PURPOSE:To adjust the time until the quantity of a reserve ionization electrons is maximized and a vibrational period by adding a high-voltage switch for a break-down and the reserve ionization exclusive circuit containing an inductance for setting a time constant and a capacitor and properly setting the time constant of the circuit. CONSTITUTION:When charge at high voltage is conducted to a capacitor 1 through an inductance 3 for charge and a high-voltage switch 4 is turned ON, a circuit is formed, and the pulse charging of a peaking capacitor 2 is performed at fast speed. Voltage between main electrodes 5, 6 rises while a reserve ionization exclusive circuit A is also shaped, and charges stored in a capacitor 12 for setting a time constant and a capacitor constituted of a second electrode 6-a dielectric 7-an auxiliary electrode 8 are discharged. Consequently, creeping discharge is generated in a plurality of opening sections in the main electrode 6, and the reserve ionization is conducted. Accordingly, the reserve ionization is performed twice until main discharge is generated, and the uniformity of the reserve ionization is improved, thus inhibiting a transition to the arc of main discharge, then generating a uniform main discharge.
申请公布号 JPS62190786(A) 申请公布日期 1987.08.20
申请号 JP19860031894 申请日期 1986.02.18
申请人 MITSUBISHI ELECTRIC CORP 发明人 WAKATA HITOSHI;INOUE MITSUO;SATO YUKIO;HARUTA TAKEO;NAGAI HARUHIKO
分类号 H01S3/097;H01S3/09;H01S3/0971;H01S3/0977 主分类号 H01S3/097
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