Device for controlling the flow of very small quantities of doping gas

摘要

The invention relates to a device for controlling the flow of active, in some cases toxic and explosive, doping gases used when carrying out coating processes. The aim of the invention is to develop a device which allows the control of very small quantities of doping gas while avoiding electric motors, expanding liquids and the expansion of metallic materials. The object of the invention is to provide a device which transmits the electronically initiated signal conversion process to a closing element capable of operating in the direction of flow and against it and does not involve a lead-through. According to the invention, the object is achieved by the fact that a thermally influencable torsion-bar closing element subjected to a defined prestress within the limits of the characteristic of the material, is arranged in a gastight housing without a lead-through, which housing is connected to a main body.