发明名称 ELECTRON BEAM HEATING DEVICE
摘要 PURPOSE:To aim at reduction of thermal loss as well as enhancement of heat conductivity from a heater to a sample, by setting supporters including samples fixed thereto being thermally isolated from a holder and assembling the heater into the holder. CONSTITUTION:Holes 8 are bored at the positions on a holder 4 where supporters are to be installed, and the supporters 7 are held by the holder in such a way that the supporters 7 are freely inserted in said holed 8 to an extent not allowing their contact with inner surfaces of the holes 8 and further pins 9 attached to the side sun faces of the supporters 7 are supported on the peripheral surfaces of holes 8. And each heater 6 is installed in each supporter 7 whose inside is hollow, by making direct contact with its inner surface. When supporters 7 are preheated by heaters 6, heat radiated from the heaters 6 is directly conducted to the supporters. 7. Heat conductivity to a sample 3 is enhanced in this way. In addition, since the holder 4 is thermally isolated from the supporters 7, there is hardly any apprehesion of heat conduction from the supporters to the holder, thus requiring very small power for preheating.
申请公布号 JPS62190645(A) 申请公布日期 1987.08.20
申请号 JP19860033619 申请日期 1986.02.17
申请人 NISSHIN HAIBORUTEEJI KK 发明人 HAYASHI KEIZO
分类号 H01L21/263;H01J37/317;H01J37/36;H01L21/265 主分类号 H01L21/263
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