| 摘要 |
PURPOSE:To prevent a holder from suffering from thermal damage caused by an electron beam by setting supporters including samples fixed thereto and being thermally isolated from the holder and heating the supporters by means of heaters, while cooling the holder instead. CONSTITUTION:Holes 8 are bored at the positions on a holder 4 where supporters are installed, and the supporters, 7 are held by the holder in such a way that the supporters 7 are freely inserted in to said holes 8 to an extent not allowing their contact with inner faces of the holes 8, and further pins 9 attached to the side sun faces of the supporters 7 are supported by being fitted in grooves 10 provided along the peripheral sun faces of the holes 8. A rotary shaft 5 is formed in to double tubes, one of which 12 and the other one 13 are used as forward passage and a return passage of refrigerant respectively. The refrigerant entering from the tube 12 circulates in a passage 11 inside the holder 4 and discharges outward from the tube 13. Electron beams are also incident on the holder 4, but its liability to suffer from thermal damage can be well avoided because the holder 4 is cooled to the refrigerant circulating through the passage 11.
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