| 摘要 |
PURPOSE:To permit integration of a waveguide type optical demultiplexer and other functional elements by using an optimized reflection type diffraction grating so that the demultiplexed signal light can be guided in an optional direction at a low loss. CONSTITUTION:An SiO2 buffer layer 16 is formed on an Si substrate 10 and an incident single mode optical waveguide 11 and exit optical waveguides 12-14 are formed on the buffer layer 16. One end of the incident single mode optical waveguide 11 and one end of the exit optical waveguides 12-14 intersect with each other at one point to form an intersected optical waveguide part 17. The reflection type diffraction grating 15 is formed on the side face of the intersected part 17. The optical waveguide widths of the incident single mode optical waveguide 11 and the exit optical waveguides 12-14 are respectively specified to several - several 10mum. The 3-wavelength multiplex signal light guided in the waveguide 11 is diffracted to different directions by every wavelength by the reflection type diffraction grating 15 and is respectively guided to the exit optical waveguides 12-14. |
