LITHOGRAPHIC MASKS,申请号EP19820307014-传众专利搜索

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发明名称	LITHOGRAPHIC MASKS
摘要
申请公布号	EP0083510(B1)	申请公布日期	1987.08.19
申请号	EP19820307014	申请日期	1982.12.31
申请人	EXXON RESEARCH AND ENGINEERING COMPANY	发明人	DECKMAN, HARRY WILLIAM;DUNSMUIR, JOHN HENRY
分类号	G03F7/004;B41M5/24;G03F7/16;H01L21/308;(IPC1-7):G03F7/26;H01L21/467	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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