发明名称 MOS SEMICONDUCTOR DEVICE HAVING A FET AND A METAL WIRING LAYER
摘要 An opening is formed at a position substantially midway along the widthwise direction of a wide metal wiring layer formed on a semiconductor substrate. A second metal wiring layer is formed in the opening in the same step for forming the wide first metal wiring layer. Drain electrodes of a CMOS inverter formed below the wide first metal wiring layer are connected to the second metal wiring layer through contact holes. The second metal wiring layer is connected to a polycrystalline silicon layer as an output wiring layer through a contact hole.
申请公布号 EP0114382(B1) 申请公布日期 1987.08.19
申请号 EP19830112993 申请日期 1983.12.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SAEKI, YUKIHIRO
分类号 H01L21/8234;H01L21/3205;H01L21/82;H01L23/52;H01L23/528;H01L27/088;(IPC1-7):H01L23/52 主分类号 H01L21/8234
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