| 摘要 |
PURPOSE:To enable a quick and accurate pattern inspection, by checking a pattern on a glass plate with measuring pins in contact with the pattern. CONSTITUTION:A glass plate being conveying by a conveying device 21 is stopped with a stopper 37 and the glass plate is placed on a stage 23 as separated from the device 21. The glass plate is positioned at a specified checking position by pressing it on the stage 23 on reference rollers 44-46 with a gauging 47. After positioned, the glass plate is sucked securely on the stage 23 and a measuring pin 52 provided on a measuring head 24 is brought into contact with the pattern on the glass plate to check. Therefore, the measuring pin 52 contacts a pattern at a point to reduce the checking time of the pattern substantially. This can also make the contact pressure of the measuring pin 52 the same thereby stabilizing measurement.
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