发明名称 Method of synthesizing a plurality of reactants and producing thin films of electro-optically active transition metal oxides
摘要 A method of synthesizing electro-optically active reaction products from a plurality of reactants by inducing a reaction by plasma deposition among the reactants. The plasma reaction is effective for consolidating the reactants and producing thin films of electro-optically active transition metal oxides.
申请公布号 US4687560(A) 申请公布日期 1987.08.18
申请号 US19850766169 申请日期 1985.08.16
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE UNITED STATES DEPARTMENT OF ENERGY 发明人 TRACY, C. EDWIN;BENSON, DAVID K.;RUTH, MARTA R.
分类号 C23C16/505;G02F1/15;(IPC1-7):C22D7/08;C05D7/00 主分类号 C23C16/505
代理机构 代理人
主权项
地址
您可能感兴趣的专利