发明名称 |
Method of synthesizing a plurality of reactants and producing thin films of electro-optically active transition metal oxides |
摘要 |
A method of synthesizing electro-optically active reaction products from a plurality of reactants by inducing a reaction by plasma deposition among the reactants. The plasma reaction is effective for consolidating the reactants and producing thin films of electro-optically active transition metal oxides.
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申请公布号 |
US4687560(A) |
申请公布日期 |
1987.08.18 |
申请号 |
US19850766169 |
申请日期 |
1985.08.16 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE UNITED STATES DEPARTMENT OF ENERGY |
发明人 |
TRACY, C. EDWIN;BENSON, DAVID K.;RUTH, MARTA R. |
分类号 |
C23C16/505;G02F1/15;(IPC1-7):C22D7/08;C05D7/00 |
主分类号 |
C23C16/505 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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