| 摘要 |
PURPOSE:To obtain a compact and simple automatic wafer transferring apparatus having a high transfer speed and enabling the execution of monitor wafer processing (for a sheet), by providing a chuck for badge transfer and a chuck for sheet transfer respectively in the ends of an arm projecting from a rotating shaft onto the opposite sides thereof and having the same rotational radius. CONSTITUTION:A chuck 8 for sheet transfer having a groove capable of holding a sheet of wafer and a chuck 9 for badge transfer having a plurality of grooves capable of holding several sheets of wafers simultaneously are provided in the opposite ends of an arm fitted to a rotating shaft 6 rotatably and movably in the vertical direction, and at positions equal in distance from the rotating shaft 6. The chuck 9 for badge transfer is moved to a position just above a cassette 3 positioned at a distance equal to the chuck from the rotating shaft, by rotating the rotary arm 7, and then the chuck 9 is lowered. Wafers 2 in the cassette 3 are lifted beforehand by a thrust comb 12, and they are held together in a plurality of sheets (one badge) by closing the chuck 9. When it is necessary to transfer wafers by sheets, the chuck 8 for sheet transfer provided on the opposite side of the rotary arm is used.
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