| 摘要 |
PURPOSE:To enable a bonding unit to perform bonding operations always as required even if the moving speed of a bonding tool is varied, by providing a control unit with means for changing intervals at which count data is called out based on a value of reference speed data stored in a memory. CONSTITUTION:A speed command based on reference speed data stored in a memory is sent to a driving circuit 12 for driving a driving apparatus 6, while count data called out of a counter 10 is compared with count data counted directly before the sending out of the command. The point for changing speeds of a bonding tool 5 is checked based on the result of the comparison, namely on a difference between those count data, and when said difference becomes zero, a movement switching command is sent to the driving circuit 12 so as to cause the bonding tool 5 to advance or retreat. In this manner, the bonding tool 5 can be moved according to a speed schedule as required. |
