| 摘要 |
<p>PURPOSE:To shorten the production process and to prevent the deposition of dust, etc., by inserting a substrate into a gaseous mixture of a specified alcohol and an adhesive, simultaneously carrying out drying and surface reforming, and then forming a photoresist film. CONSTITUTION:The polished and cleaned substrate of glass, etc., is inserted into a processing vessel wherein a mixture of an alcohol for drying and an adhesive (e.g., hexamethyldisilazane) is heated and vaporized, and reformed. The photoresist film is subsequently formed. Since the two stages, drying and reforming, can be reduced to one stage by this method, the deposition of dust can be prevent in this process, and the productivity is improved.</p> |
