| 摘要 |
PURPOSE:To securely decide the end point of etching by arranging coil conductors of respective channels at specific intervals and detecting the end point of etching from whether or not those conductors are electrically conductive. CONSTITUTION:An insulating layer 2 and a conductor layer 3 are provided on a lower magnetic substrate 1 and the layer 3 is etched in a pattern. At this time, a mask is formed so that the gap D between coil conductors 4a and 4b is almost equal to or less than the gap size (d) between the conductors 4a and 4b. Then, when the layer 3 is etched, a couple of detection pins are pressed against, for example, the conductors 4a and 4b to check whether or not the pins conduct electrically to each other, judging the end point of etching. Similarly, the end point of etching as to conductors formed on the conductors 4a and 4b is also judged. The end point of etching is decided securely by this method to prevent a defective from being formed. |
