| 摘要 |
PURPOSE:To inspect precisely the curvature of a pin of an IC package by arranging electrode groups on a substrate in conformity with pin gaps of the IC package, and providing a power supply circuit and a current detecting circuit for each electrode in the electrode group. CONSTITUTION:An inspecting instrument is provided with electrode groups 300 of electrodes 301-319 as many as pins on an elastic substrate 400 in conformity with pin gapa of the IC package, and power supply circuits 201-204 and current detecting circuits 101-104 are provided for the respective electrodes. Then, when the pins of the IC package are so arranged that, for example, the electrodes 303 and 306 short-circuit with each other, a current path consisting of the circuit 201, circuit 101, electrode 303, electrode 306, circuit 102, and circuit 202 is formed and the flow of a current is detected by the circuits 101 and 102. If a pin of the IC package is curved, a current path is formed at a part in the electrode group 300 corresponding to the pin which has a different position relation with parts in other electrode groups 300 and this difference is confirmed by monitoring the respective current detecting circuits.
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