| 摘要 |
PURPOSE:To reduce expenses for a maintenance and a check by providing a reflecting plate to an evaporated reducing material, between a carrier means, and a heating chamber and a suction and exhaust hole, and also, providing adsorbing plate between the heating chamber and the suction and exhaust hole. CONSTITUTION:The first reflecting plate 13 is provided on a supporting tool 11 of a carrying means 10, and also, an inclined plate part 4a and a vertical plate part 14b are formed in the upper part of the reflecting plate 13. Also, the second reflecting plate 16, and the third reflecting plate 17 are installed to a support 3, and the upper wall part of a suction and exhaust hole 1 side, respectively. On the other hand, an adsorbing chamber 18 is provided on a passage 2a extending from a chamber 5 of the upper side of a vacuum chamber 2 to the suction and exhaust hole 1, and also, plural adsorbing plates 20 are fixed in parallel to the lower face of a flange plate 19. According to such a constitution, an evaporation reducing material which is generated at the time of brazing is reflected and adsorbed, and can be removed. Accordingly, expenses for a maintenance and a check can be reduced. |
