| 摘要 |
PURPOSE:To prevent a wasteful use of a material to be vacuum deposited by intercepting evaporated particles flying from an evaporating source in undesirable directions with a wall for recovery heated to a high temp. by the radiant heat from the evaporating source so as to recover the particles. CONSTITUTION:A material 4 to be vacuum deposited is put in an evaporating source 2 and evaporated by heating. At this time, a wall 5 for recovering evaporated particles placed so as to surround a flow of vapor is heated to a temp. above the m.p. of the material 4. Evaporated particles flying toward the wall 5 flow downward along the wall 5 and are recovered in the source 2. Evaporated particles flying upward deposit on a substrate 3. Thus, vacuum deposition is carried out.
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