| 摘要 |
PURPOSE:To provide triode characteristics in a tunnel effect element, by providing a grid electrode between and anode and the cathode electrode of the tunnel effect element. CONSTITUTION:A first niobium wiring 2 is formed on an insulating substrate 1 as an anode. A tunnel insulating film 4, which also serves the role of insulation, is formed on the wiring 2. A grid 3 is formed with niobium in a lattice shape so as to hold the insulating film 4. A second niobium wiring 5, which is to become a cathode, is formed through the insulating film 4. Thus the triode characteristics are provided in the tunnel effect element. |
