| 摘要 |
PURPOSE:To make the moving direction of the image of an electron microscope constant regardless of the rotation of the image, by furnishing two pairs of coils to move the image of the microscope, and correcting the moving direction of the image when the microscope is rotated to make the direction coincide with the direction prior to the rotation. CONSTITUTION:Coils to move the image of an electron microscope are furnished to make a pair of coils XU2 and XL4, and a pair of coils YU1 and YL3 in respect to the optical axis. In such a composition, by bending the electron beam at a deflection angle 5 by the coil XU2, and then by bending at the deflection angle 5 in the inverse direction, for example, the electron beam is moved at the distance 6. When the image of the microscope is rotated at a desired angle by a magnetic field lens, the current of the coils 1 to 4 are controlled to correct the image to position at the rotated position in the reverse direction at a same amount of the rotation. Therefore, the moving direction can be made constant regardless of the image rotation, and the operational property can be improved.
|
