| 摘要 |
PURPOSE:To obtain a work having stable characteristics by measuring the alkali concn. in a developing soln. which develops a pattern forming agent coated on the surface of the work after exposing by a measuring means and controlling the developing soln. thereby executing good development and automatically exchanging the developing soln. CONSTITUTION:The work 3 is immersed in the developing soln. 2. A sensor 5 which is a detecting part of measuring means such as pH meter, ion electrode or titrator is dipped into the developing soln. 2 and whether the developing soln. 2 is usable or not is judged by the detected alkali concn., by which the soln. control is executed. A display part 7 which displays the alkali concn., a recording part 9 which records the alkali concn., an alarm part 9 which alarms the decrease of the alkali concn. when the alkali concn. decreases to the value below the prescribed value (permissible value) and selector valves 10, 11 are connected to the control part 6. The selector valve 10 is interposed in a discharge pipe 12 to discharge the developing soln. in a developing tank 1 and the selector valve 11 is interposed in a supply pipe 14 to supply the fresh developing soln. from a storage tank 13 into the developing tank 1. |
