AIR CLEANER IN CLEAN ROOM

摘要

PURPOSE:To simplify the construction of the air cleaner and to save the cost therefor by disposing a plenum chamber containing a blower for supplying clean air to a clean air blow-off space and a superhigh performance filter at the top portion of a return chamber adjacent to a tunnel portion. CONSTITUTION:Clean air supplied to a clean air blow-off space 1 at the top portion of a turnnel portion B by a blower 4 and a superhigh performance filter 5 contained in a plenum chamber 3 at the top portion of a return chamber D' is blown off into the tunnel portion B and a passage portion C through clean air blow-off ports 2 continuously provided from the lower surface of the space portion 1 across the side surface thereof to clean the spaces B and C of respective portions. Air which has cleaned the inside of the clean room A enters into the return chamber D' via a return port 7, and is returned to the plenum chamber 3 at the upper part thereof.