| 摘要 |
PURPOSE:To make a floor surface usable so effectively as well as to aim at improvement in operability and safety, by controlling the travel of a truck, via wheels, in a state of being attracted and held on the iron plate laid down on a ceiling by dint of attraction of a magnet set up in the conveyor truck. CONSTITUTION:A partition wall 2, partitioning off the space into a room 3 and a clean room 4, is installed in a lower part of the iron plate 1 laid down on a ceiling, and each wheel 6, a battery 7, a motor 8, a steering gear and a controller for the motor 8 and the steering gear are all set up in a truck 5. And, the truck is provided with a permanent magnet 9 for attracting and holding itself to the iron plate 1, an electromagnet 11 for spatially holding a container 10 beneath, a gap sensor detecting an interval between the container 10 and the truck 5 and furthermore a microcomputer regulating attraction of the electromagnet 11 and keeping the interval between the container 10 and the truck 5 constant. The container 10 loads a semiconductor wafer or the like being conveyed with an iron piece at a position to be opposed to the electromagnet 11. Next, the truck 5 is controlled by the microcomputer along the induction line 13 laid down on a surface of the iron plate 1, whereby a floor surface is effectively usable. |
