| 摘要 |
PURPOSE:To facilitate connection work of a conductor, by a method wherein a thin film electrode on a piezoelectric element is formed in extension to a fixed member via on a support rod and connected to the conductor on the fixed member to determine the node position of a vibrator accurately. CONSTITUTION:Piezoelectric elements 2, 3, 4 and 5 for detection or excitation on four sides of a vibrator 1 are formed and a thin filmlike electrode 8 is formed on the respective elements This electrodes 8 are each extended along the length of the vibrator 1 at one end thereof to reach a fixed member 7 via support rods 10 at the node part. The electrode 8 on the member 7 is made larger in the area thereof to form a connection section 8a to which is connected to a conductor 9 of an external circuit. With such an arrangement, when the vibrator 1 bends and vibrates, it is allowed to vibrate as a one barlike member with no conductor or the like connected. The support rod 10 also is integrated with the member of the electrode 8, acting as one support rod 10. Thus, the node is produced at a preset position thereby minimizing degraded performance, variations in the vibration mode and the like. |
