| 摘要 |
PURPOSE:To obtain a biosensor excellent in stability, capable of measuring the concn. of a substrate with good selectivity, having sufficient strength and easy to handle, by directly fixing an enzyme film on the ion sensitive film of a separation gate type ISFET using a sapphire substrate. CONSTITUTION:A separation gate type ISFET is provided to a sapphire substrate and an ion responsive film 2 having an enzyme film 3 fixed thereto is provided to the sapphire substrate at a position slightly separated from said ISFET through an insulating material 4. ISFET has a drain 6, a source 7 and a gate 5 while the gate 5 is connected to the ion responsive film 2. The ion responsive film 2 is used by a method for providing iridium oxide or palladium oxide to the substrate by vapor deposition from the aspect of the excellent pH-sensitivity thereof. The enzyme film 3 contains enzyme and has function for supporting said enzyme on the responsive film 2 and, as enzyme, for example, urease (for detecting urea) and glucose oxidasse (for detecting glucose) etc. decomposing a substrate to generate a proton are used. |
