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发明名称
Apparatus for producing semiconductor devices
摘要
申请公布号
US3290738(A)
申请公布日期
1966.12.13
申请号
US19640336535
申请日期
1964.01.08
申请人
SIEMENS & HALSKE AKTIENGESELLSCHAFT
发明人
KLIMA KARL GERHARDT;NOSS KORNELIUS
分类号
H01L21/00;H01L21/24
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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