TWO-DIMENSIONAL SEMICONDUCTOR OPTICAL POSITION DETECTOR

摘要

PURPOSE:To obtain a two-dimensional optical position detector which has large detection area by using plural linear semiconductor optical position detectors by providing translucent property to each coordinate surface positioned on a light incidence side and superposing coordinate detection surfaces one over the other so that their coordinate axes cross each other at right angles. CONSTITUTION:The X coordinate detection surface 10 and Y coordinate detection surface 20 both have translucent property. The X coordinate detection surface 10 and Y coordinate detection surface 20 are superposed on over the other so that their coordinate axes X and Y cross each other at right angles. A light beam is incident on the X coordinate detection surface 10 at a point P and also incident on the Y coordinate detection surface 20 at the same position after passing through the detection surface 10, and the beam reaches photoelectric conversion layers 113 in both detection surfaces 10 and 20 through translucent resistance layers 114, so that light generated currents are generated at the incidence positions P through the photoelectric conversion operation of the layers 113. Said current is divided by resistances rX1 and rX2 or resistances rY1 and rY2; and divided currents IX1 and IX2 indicate the X-directional coordinate position and divided currents IY1 and IY2 indicate the Y-directional coordinate position.