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发明名称
HOUSING FOR A TURBO-MOLECULAR VACUUM PUMP
摘要
申请公布号
EP0197238(A3)
申请公布日期
1987.08.12
申请号
EP19860100310
申请日期
1986.01.11
申请人
LEYBOLD-HERAEUS GMBH
发明人
DETERS, LUDGER, DR.;KABELITZ, HANS-PETER, DR.;SCHUTZ, GUNTER
分类号
F04B37/14;F04D19/04;F04D29/58;(IPC1-7):F04D19/04
主分类号
F04B37/14
代理机构
代理人
主权项
地址
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