| 摘要 |
PURPOSE:To improve the detection sensitivity of dew condensation without increasing the size of a dew condensation sensor by providing an under coat layer having a low dielectric constant between a glass substrate and comb- shaped transparent electrodes. CONSTITUTION:A polyester film 2 is adhered as the under coat layer having the low dielectric constant on the glass substrate 1. The comb-shaped transparent electrodes 3 consisting of ITO are formed by a sputtering method on the polyester film 2 in succession thereto. An insulating protective film 4 consisting of aluminum oxide is formed by sputtering on the comb-shaped transparent electrodes 3 and the polyester film 2. Since the under coat layer is provided between the glass substrate and the comb-shaped transparent electrodes, the dielectric constant epsilon is made small overall and the sensitivity of a capacitor, i.e., the dew condensation sensor is improved.
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