| 摘要 |
PURPOSE:To keep favorable positioning accuracy by providing a feedback circuit with means for adjusting gain of displacement feedback means, interlocking with gain of set point adjusting means. CONSTITUTION:A displacement feedback gain signal Cs, a displacement set point adjusting signal Cp, and a velocity feedback gain signal Cv are output from rigidity setting means 12 for setting positioning and rigidity of a driving mechanism. According to the displacement set point adjusting signal Cp, displacement set point adjusting means 13 is operated, a displacement feedback signal amplifier 18 is operated according to the displacement feedback gain signal Cs, and gans of both are adjusted, interlocking with each other. Thus, even if the rigidity of the driving mechanism is adjusted by changing the gain of the displacement feedback means of the driving mechanism, the gain of the displacement set point adjusting means 13 is changed, interlocking therewith, so that the displacement of the driving mechanism is dept unchanged to keep the positioning accuracy favorably.
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