发明名称 |
Semiconductor deposition method and device. |
摘要 |
<p>A method is disclosed of epitaxially depositing a semiconductor material (312) on a substrate (311) of different material while accommodating lattice mismatch in a manner that results in improved epitaxially deposited material. In a disclosed embodiment GaAs is epitaxially deposited by molecular beam epitaxy on a silicon substrate having a [100] crystallographic surface tilted in the <001> direction. Improved semiconductor devices, made using the disclosed technique, are also set forth.</p> |
申请公布号 |
EP0232082(A2) |
申请公布日期 |
1987.08.12 |
申请号 |
EP19870300560 |
申请日期 |
1987.01.22 |
申请人 |
UNIVERSITY OF ILLINOIS |
发明人 |
MORKOC, HADIS;FISCHER, RUSS |
分类号 |
H01L29/73;H01L21/20;H01L21/203;H01L21/26;H01L21/331;H01L21/338;H01L29/04;H01L29/20;H01L29/737;H01L29/812 |
主分类号 |
H01L29/73 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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