| 摘要 |
PURPOSE:To efficiently detect a defective pattern with high accuracy, by controlling variably the portion of the thinning of a pattern to be inspected, detecting the feature of the pattern to be inspected on which a thinning process is applied, and detecting the defective pattern. CONSTITUTION:A feature detecting part inputs a picture data on which the thinning process is applied to three steps of line buffers 9a-9c connected in series, and stores the parallel outputs of three lines in order to a mask register 10 of 3X3. According to the patterns of picture elements of 3X3 stored at the mask register 10, an address register 11 performs the address designation of a logic mask table 12, and the information for feature points corresponding to the patterns of the picture elements of 3X3, that is, the information which represent the classes of the defective patterns, can be obtained. The table 12 stores the information for the defective patterns corresponding to the logic mask setting the logic masks corresponding to the features of every kinds of defective patterns as addresses. And when an input pattern corresponding to the defective pattern is obtained, the feature information of the pattern is outputted. |
