发明名称 CRYSTAL AXIS ANALYZING DEVICE
摘要 PURPOSE:To shorten a time and to determine a crystal axis by one-time measurement by rotating the polarization directions of incident light and scattered light in in-phase relation at the same time and measuring polarization characteristics. CONSTITUTION:Polarization characteristics of Raman scattered light from a sample are measured by rotating the polarization directions of the incident light and scattered light in in-phase relation at the same time. Namely, the intensity of the scattered light is measured while a polarizing rotator 14 and an analyzer 21 are rotated in phase at the same time, obtaining the polarization characteristics. When the azimuth of the crystal axis is analyzed, a data string showing the polarization characteristics of the Raman scattering intensity is fetched. For such a purpose, the polarization direction 2 of the incident light and the polarization direction 4 of the scattered light are aligned in phase with each other and rotated from 0 deg. to 180 deg. at the intervals of several degrees and the scattering intensity is measured simultaneously.
申请公布号 JPS62184333(A) 申请公布日期 1987.08.12
申请号 JP19860026166 申请日期 1986.02.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 INOUE YASUAKI;NISHIMURA TADASHI;SUGAHARA KAZUYUKI;KUSUNOKI SHIGERU
分类号 H01L21/66;G01N21/00;G01N21/21;G01N21/65;G01N21/84 主分类号 H01L21/66
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