| 摘要 |
An accelerometer comprises a silicon beam (1) which is supported at one end and which has a layer of piezoelectric material (2) bonded thereto. A plurality of beams are manufactured simultaneously by dicing a silicon wafer to which the piezoelectric material has been bonded. The surface of the wafer opposite the bonded layer is etched so that the beams thus formed have a support body portion (3) to facilitate mounting. |
