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发明名称
摘要
申请公布号
JPS62126832(U)
申请公布日期
1987.08.12
申请号
JP19860013264U
申请日期
1986.02.03
申请人
发明人
分类号
B08B7/00;H01L21/027;H01L21/30;H01L21/302;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B7/00
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