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发明名称
ELECTRON BEAM LINE WIDTH MEASUREMENT SYSTEM
摘要
申请公布号
EP0184859(A3)
申请公布日期
1987.08.12
申请号
EP19850115938
申请日期
1985.12.13
申请人
HITACHI, LTD.
发明人
NAKAYAMA, YOSHINORI;OKAZAKI, SHINJI;OBAYASHI, HIDEHITO;ICHIHASHI, MIKIO
分类号
G01S13/74;G01B7/02;G01B15/00;H01J37/28;(IPC1-7):G01B7/14
主分类号
G01S13/74
代理机构
代理人
主权项
地址
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