| 摘要 |
PURPOSE:To deposit a uniform film of a metallic compd. by evaporation on the surface of reinforcing fibers by keeping the reinforcing fibers suspended in a reaction chamber and bringing the reinforcing fibers into contact with a plasma-excited gas. CONSTITUTION:The inside of the reaction chamber 2 is heated by a heater 10 and the inside of the reaction chamber 2 is evacuated to a reduced pressure through a discharge pipe 5. A metallic raw material compd. and reactive gas are introduced through an introducing pipe 4 into the reaction chamber 2. The raw material compd. and the reactive gas are held excited when a high frequency is impressed to the inside of the reaction chamber 2 by plasma electrodes 9a, 9b. Whiskers are then introduced through an introducing pipe 3 into the chamber and gas is blown upward through gas introducing holes 6 from the top surface of a rotary shut off valve device 7 to blow up and suspend the whiskers. The reactive gas in the excited state contacts the suspended whiskers and coats the surface of the whiskers with the metallic compd.
|
