发明名称 MOLECULAR BEAM SOURCE
摘要 PURPOSE:To enable the inspection of the filling state of a raw material from detected temperature difference, by heating a raw material in a crucible and measuring temperatures of different parts along the filled direction of the raw material in the crucible with a temperature detection means. CONSTITUTION:A data for the comparison of temperature difference is inputted from a key board 41 and stored as T3 in a microcomputer 40. Temperatures detected by thermocouples 30, 31 are monitored, transmitted to the microcomputer 40 and stored in T1 and T2. The absolute value of the difference of T1 and T2 is stored in T. When the value of T is smaller than that of T3, the data T1 and T2 obtained by the subsequent monitoring are compared with T3, and the steps are repeated. On the contrary, when the value of T is larger than that of T3, a message is displayed on a CRT 42 by a program. For example, when the raw material-filling position is A, the temperature difference detected by the thermocouples 30, 31 is small and the monitoring is repeated. When the raw material filling position is lowered to the level B, the temperature difference detected by the thermocouples 30, 31 becomes large and a message is displayed on the CRT 42 to inform the operator of the necessity of the supply of the raw material.
申请公布号 JPS62182193(A) 申请公布日期 1987.08.10
申请号 JP19860021958 申请日期 1986.02.05
申请人 HITACHI LTD;HITACHI TECHNO ENG CO LTD 发明人 OKIGUCHI MASASHI;TADA KEIJI;KANAI NORIO
分类号 C30B23/08;H01L21/203 主分类号 C30B23/08
代理机构 代理人
主权项
地址