发明名称 WIRE BONDER
摘要 PURPOSE:To prevent interference with other units without shielding a light path from a microscope, by a constitution wherein the main body of a torch electrode is moved around an axis and also moved in the thrust direction of the axial direction. CONSTITUTION:When a bearing 19 of a driving arm 20 is compressed to a slave arm 17 of a torch electrode main body 31, a pulling spring 23, which is engaged with an arm 21 and the slave arm 17, is pulled. A torch electrode 5 is moved in the direction shown by A with a shaft 24 as an axial center. When the compressing force of the driving arm 20 is eased, the slave arm 17 is returned with the internal energy of the pulling spring 23. The torch electrode 5 is moved in the direction of A with the shaft 24 as the axial center and performs oscillating motion. Since the torch electrode 5 is swung in the direction at a right angle with respect to a horn axis 11, a light path between a microscope 15 and the tip part of a capillary is not shielded. Interference with other units can be prevented.
申请公布号 JPS62181437(A) 申请公布日期 1987.08.08
申请号 JP19860023252 申请日期 1986.02.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 IWATA MASANARI
分类号 H01L21/603;H01L21/60 主分类号 H01L21/603
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