发明名称 MICROFAST ATOMIC BEAM SOURCE DEVICE
摘要 PURPOSE:To achieve simple extraction of convergent atomic beams by providing a convex-spherical shaped part for forming said convex-spherical shape against an anode, on a portion of cathode and forming many holes to the convex- spherical part so that said holes may act as outlets of corpuscular beams. CONSTITUTION:Both end of a cathode case act as cathodes 11, 12 and these are grounded. Meanwhile, a gas input 9 is provided on the cathode 11 and 12. Within the cathode case, round bar type anodes 10 are installed respectively in upper and lower positions of center of the cathode case and these are connected to a power supply 13 provided outside. And the shape of the center surface of the cathode 11 is formed in a convex-spherical surface viewing from the anode side (against the inside of the cathode case). Many outlets 14 for corpuscular beams are formed vertically to the convex-spherical part and center lines of said outlets are jointed at a point. By this way, extraction of convergent atomic beams can be carried out simply.
申请公布号 JPS62180935(A) 申请公布日期 1987.08.08
申请号 JP19860022152 申请日期 1986.02.05
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 KUWANO HIROKI;NAGAI KAZUTOSHI;SHIMOKAWA FUSAO
分类号 H01J27/00;H01J27/20;H01J37/08;H05H3/02 主分类号 H01J27/00
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