| 摘要 |
PURPOSE:To eliminate a slide section and to prevent dust from being produced, by rotating a telescopic arm section in association with the operation of a rotary drive section so that a sample supporting section is rectilinearly moved along a guide section. CONSTITUTION:When a drive device 51 rotates a holder 12 toward the right in the drawing, by means of a drive shaft 52, a guide plate 31 in a guide section 30 coupled to the forward end of an arm 11 which is slidably fitted and held in the holder 12 by means of a linear bearing, is rectilinearly moved in the same direction as mentioned above, along a guide rail 33. That is, a vacuum chuck 22 in a sample support section 20 which is arranged on a frame 23 fixed on the guide plate 31, through the intermediary of a support 21. The drive device 51 also has a function such that the drive shaft 52 may be elevated, and therefore, the vacuum chuck 22 is vertically movable, thereby it is possible to facilitate the mounting and removal of the vacuum chuck 22.
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