发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To prevent the generation of soft errors due to radiant rays by forming the inside edges of a high impurity concentration region for inter- element isolation as far as right under a high impurity concentration region connected to bit lines and to right under a high impurity concentration region for forming a charge storing region. CONSTITUTION:Both inside edges of a p<+> type impurity region 4 are extended respectively in lateral direction inside edge parts of a field oxide film 2 as far as right under an n<+> type impurity region 6a connected to a metallic wiring region 8 and to right under an n<+> type impurity region 6b which will become a charge storing region. By this constitution, electrons consisting of a pair of electrons and holes produced by incident radiant rays are caught in the p<+> impurity region 4 and are prevented from gathering in the n<+> type impurity regions 6a and 6b. Consequently, soft errors due to the damage of memory information or the like become not to be generated.
申请公布号 JPS62181463(A) 申请公布日期 1987.08.08
申请号 JP19860024305 申请日期 1986.02.04
申请人 MITSUBISHI ELECTRIC CORP 发明人 YONEDA MASAHIRO;UOTANI SHIGEO
分类号 H01L27/10;G11C11/34;H01L21/8242;H01L27/108 主分类号 H01L27/10
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