| 摘要 |
PURPOSE:To detect whether a component is present or not, a position shift, etc., even if its color is similar when the color of the component is different from the color of an element substrate by comparing color images of plural colors obtained by image pickup operation. CONSTITUTION:A standard color chart which contains any hue, brightness, and saturation is used to normalize the value of a subtraction video signal G-B obtained by subtracting a B primary color signal from a G primary color signal of a color TV camera to a level within a specific range, and then almost all colors within a certain level range are included and discriminated from colors which exceeds the range. For the purpose, a reference printed board 25-1 is mounted on an XY table part 15 and a color image of the substrate 25-1 is inputted from an image pickup part 16 to a processing part 17. The processing part 17 generates the subtraction video signal G-B from the image signal and stores feature parameters of components 28-1-28-n. Then, a subtraction video signal G-B is generated from an image signal obtained by picking up an image of a substrate 25-2 to be inspected and feature parameters of the components 28-1-28-n are extracted to compare parameters to be inspected with reference parameters, deciding whether the substrate 25-2 is normal or not. |
