| 摘要 |
PURPOSE:To improve the wear resistance and corrosion resistance of a roll and to extend the life thereof by subjecting the roll surface to ion implantation or vacuum deposition and ion plantation and subjecting the roll to a thin film treatment with high strength and adhesiveness. CONSTITUTION:The roll 2 is imposed on a roll construction 18 of a holding mechanism in a vacuum vessel 1. The axial center of the roll 2 is aligned in height to the center of rotation of a rotating power transmission mechanism 8. The roll 2 is rotated at a specified speed by the mechanism 8. A metal for vapor deposition such as Ti is then released by an electron beam, etc., (not shown) from a vapor deposition device 3 and is deposited by evaporation on the roll 2. Ions of nitrogen, etc., are implanted thereto by right and left ion implantation devices 5 of the device 3. The same effect is obtd. by executing the above-mentioned vacuum deposition and ion implantation simultaneously or executing alternate and repetitive treatment by opening and closing shutters 4, 6 for vapor deposition and ion implantation. The heat generated by the roll 2 during the above-mentioned treatment is diffused by a cooling mechanism 11 which passes a cooling medium such as water to a cooling pipe 14. |
