| 摘要 |
PURPOSE:To inspect an object printed board in detail in a short period by dividing the printed board into plural areas for each image pickup magnification and controlling the zooming and focusing of a TV camera before an image of areas of each magnification is picked up. CONSTITUTION:The TV camera 1 which picks up an image of the printed board P to be inspected on an XY stage 2 is equipped with a zooming mechanism and an automatic focus mechanism. Then, the printed board P is divided into plural areas for each image pickup magnification and the zooming and focusing of the camera 1 are controlled by a processing part 3 before an image of areas of each magnification is picked up. For example, an area where a component C is mounted relatively roughly is zoomed by A times and focused and then picked up; and an area where the component is mounted relatively closely is zoomed by 3A times and focused, and then picked up. Further, the closest area is zoomed by 5A times and focused, and then picked up to obtain feature parameters of the component C over the entire area of the board P, and the feature parameters are compared with reference parameters of each component C to perform inspection. |
