| 摘要 |
PURPOSE:To efficiently coat the inside surface of a coating pipe with good adhesiveness at a high film forming speed by generating glow discharge in the coating pipe consisting of a conductive material in a vacuum vessel into which a gas contg. elements for a film is introduced. CONSTITUTION:The conductive coating pipe 1 is housed in the vacuum vessel 5 and a gas introducing pipe 9 attached to the vacuum vessel 5 is connected via an insulator 4 thereto. A heater 7 for heating consisting of a metallic plate and heater wound like a coil on the outside thereof is provided to the outside circumference of the above- mentioned coating pipe 1 and near the upper pipe end. The coating pipe 1 is heated to a prescribed temp. by the above-mentioned heater 7 and the inside of the vacuum vessel 5 is evacuated to a prescribed vacuum degree through a discharge port 8. The coating pipe 1 is then connected as the 1st electrode to a high voltage power source 6 such as RF power source and the vacuum vessel 5 is grounded as the 2nd electrode. The heater 7 is thereby acted as an electromagnetic shield and the glow discharge is generated only in the coating pipe 1 by which the gas such as metallic hydride supplied from the gas introducing pipe a is brought into cracking reaction and a film is deposited on the inside surface of the coating pipe 1. The coating thereof is thus executed.
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