APPARATUS FOR MONITORING PARAMETERS OF MICROASSEMBLIES,申请号SU19864031882-传众专利搜索

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发明名称	APPARATUS FOR MONITORING PARAMETERS OF MICROASSEMBLIES
摘要
申请公布号	SU1328797(A1)	申请公布日期	1987.08.07
申请号	SU19864031882	申请日期	1986.03.04
申请人	KI POLT I IM.50-LETIYA VELIKOJ SOTSIALISTICHESKOJ REVOLYUTSII	发明人	TUZ YULIAN M,SU;VOLODARSKIJ EVGENIJ T,SU;NESTERENKO VALENTIN F,SU;BEDA VLADIMIR I,SU
分类号	G05B23/02	主分类号	G05B23/02
代理机构		代理人
主权项
地址

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