| 摘要 |
PURPOSE:To improve sealing quality for a vacuum vessel by providing double gaskets to be arranged at both internal and external sides on the joint surfaces of connection flanges, and forming an intermediate gas chamber sealed with the same kind of gases as those in the vacuum vessel between both of said gaskets. CONSTITUTION:At the joint surfaces of connection flanges 21a and 22a for vacuum vessel, there are double gaskets 31 and 32 provided for arrangement on both internal and external sides. And an intermediate gas chamber 33 sealed with the same kind of gases as those in said vessel is formed between both gaskets 31 and 32. Consequently, as the gaskets 31 and 32 are double-structured, a leak amount is reduced and outside air is thinned through the mixing thereof with gases in the intermediate chamber 33, even if there is an ingress of outside air due to a leak, thereby keeping the inside of the vacuum vessel almost free from an ingress of outside air.
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