Clean room with conveying device

摘要

A clean room with a conveying device (2) which transports transport containers (8) from one processing station (51, 52, 53) to the next is described. The clean room in accordance with the invention is distinguished by the combination of the following features: - the clean room (1) can be fully encapsulated, - at least one feed and removal device (3) transfers the carriers via a lock (6) into the working region of the conveying device and removes them via a lock, - the conveying device (3) has a carrier supporting arm which is pivotable about an axis, and - the processing stations (5) are arranged in the swivelling range of the supporting arm. <IMAGE>